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Industrial equipment

Epsilon single wafer epitaxy tool
In stock 
The Epsilon single wafer epitaxy tool offers a wide range of epitaxy applications, ranging from high temperature silicon for wafer preparation, to low temperature, selective or non-selective silicon germanium (SiGe) for transistor strain layer formation. The Epsilon reactor utilizes integrated...
Group: Industrial equipment
Atomic Layer Deposition tools
In stock 
Both ASM International's Front-end and Back-end product lines are positioned to serve the immediate and future needs of the semiconductor industry. ASM's tools are engineered for leading-edge processes.
Group: Industrial equipment


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