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Production equipment

Pulsar® ALD Process Module
In stock 
Pulsar is a process module that deposits by atomic layer deposition (ALD) high-k dielectric materials required for advanced CMOS gate stack and other high-k applications. ASMs Microchemistry division introduced ALD processing to the industry and Pulsar is now in high volume production at advanced...
Group: Production equipment
EmerALD process module
In stock 
EmerALD is a process module designed to deposit thin conformal metal layers by atomic layer deposition (ALD) for advanced CMOS gate stacks and other applications. The EmerALD process module utilizes the sequential exposure of a heated wafer to gases, which once in the targeted process parameter...
Group: Production equipment


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