Reactors
In stock
The Eagle family of single wafer PECVD and PEALD reactors has demonstrated superior production performance. The Eagle solutions feature high productivity and up-time, stable uniformity, small footprint, simple mechanism and low CoO. Eagle reactors are designed for optimum deposition of the Aurora®...
Group: Reactors
In stock
The Dragon family of reactors are 300mm HVM proven solutions specifically tailored for conventional PECVD applications.
• Simplified design enables shortened lead time for manufacturing and installation
• Low CoO performance
• Efficient energy consumption
• Effective capital investment
•...
Group: Reactors
