The Eagle family of single wafer PECVD and PEALD reactors has demonstrated superior production performance. The Eagle solutions feature high productivity and up-time, stable uniformity, small footprint, simple mechanism and low CoO. Eagle reactors are designed for optimum deposition of the Aurora®...
The Dragon family of reactors are 300mm HVM proven solutions specifically tailored for conventional PECVD applications. • Simplified design enables shortened lead time for manufacturing and installation • Low CoO performance • Efficient energy consumption • Effective capital investment •...